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QCM 5 MHz 14 mm Cr/Au Inficon*

10 sensors per package. For use in film thickess monitors. Very reliable function due to good adhesion of electrodes. Long operational life time. Two sided circumference contact back side electrode.

Description

QUICK DATA for QCM 5 MHz 14 mm Cr/Au Inficon*

* also compatible with Maxtek, Sycon, Sigma, Intellimetrics, Fil-Tech, Phelps
  

GENERAL

Item

Parameter

Value

1.0

Sensor design

Plano-Convex

2.0

Angle of cut

AT

3.0

Jig compability

Inficon*

 

 

 

ELECTRICAL

4.1

Nominal frequency

5.000 MHz

4.2

Center frequency

4.967 MHz

4.3

Frequency tolerance

+/- 7 KHz

4.4

Q-value

> 150 000

4.5

Shunt capacitance, C0

Typ. 13 pF

 

 

 

ELECTRODES

5.1

Front electrode diameter

13.0 mm

5.2

Front electrode material

Cr/Au,   Chromium / Gold

5.3

Back electrode diameter

6.4 mm

5.4

Back electrode material

Cr/Au,   Chromium / Gold

5.5

One sided contacting

No

 

 

 

MECHANICAL

6.1

Nominal blank diameter

14.0 mm

6.2

Crystal axes orientation

No

6.3

Surface appearance

Matte

6.4

Bevel

No
QCM 5 MHz 14 mm Chromium / Gold Inficon

Datasheet

Document (1)

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