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QCM 6 MHz 14 mm Ni/Ag Inficon*

10 sensors per package. For use in film thickess monitors. Very reliable function due to good adhesion of electrodes. Long operational life time. Two sided circumference contact back side electrode.

Description

QUICK DATA for QCM 6 MHz 14 mm Ni/Ag Inficon

* also compatible with Maxtek, Sycon, Sigma, Intellimetrics, Fil-Tech, Phelps.
  

GENERAL

Item

Parameter

Value

1.0

Sensor design

Plano-Convex

2.0

Angle of cut

AT

3.0

Jig compability

Inficon

 

 

 

ELECTRICAL

4.1

Nominal frequency

6.000 MHz

4.2

Center frequency

5.983 MHz

4.3

Frequency tolerance

+/- 7 KHz

4.4

Q-value

> 150 000

4.5

Shunt capacitance, C0

Typ. 16 pF

 

 

 

ELECTRODES

5.1

Front electrode diameter

13.0 mm

5.2

Front electrode material

Ni/Ag,   Nickel / Silver

5.3

Back electrode diameter

6.4 mm

5.4

Back electrode material

Ni/Ag,   Nickel / Silver

5.5

One sided contacting

No

 

 

 

MECHANICAL

6.1

Nominal blank diameter

14.0 mm

6.2

Crystal axes orientation

No

6.3

Surface appearance

Matte

6.4

Bevel

No
 

Datasheet

Document (1)

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