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QCM 5 MHz 12.5 mm Cr/Au Sloan, Ulvac

10 sensors per package. For use in film thickess monitors. Very reliable function due to good adhesion of electrodes. Long operational life time. Same large size electrodes on both sides.

Description

QUICK DATA for QCM 5 MHz 12.5 mm Cr/Au  Sloan, Ulvac

 

  

GENERAL

Item

Parameter

Value

1.0

Sensor design

Plano-Convex

2.0

Angle of cut

AT

3.0

Jig compability

Sloan, Ulvac

 

 

 

ELECTRICAL

4.1

Nominal frequency

5.000 MHz

4.2

Center frequency

4.995 MHz

4.3

Frequency tolerance

+/- 7 KHz

4.4

Q-value

> 150 000

4.5

Shunt capacitance, C0

Typ. 18 pF

 

 

 

ELECTRODES

5.1

Front electrode diameter

11.5 mm

5.2

Front electrode material

Cr/Au   Chromium / Gold

5.3

Back electrode diameter

11.5 mm

5.4

Back electrode material

Cr/Au,   Chromium / Gold

5.5

One sided contacting

No

 

 

 

MECHANICAL

6.1

Nominal blank diameter

12.5 mm

6.2

Crystal axes orientation

No

6.3

Surface appearance

Matte

6.4

Bevel

No
 

Datasheet

Document (1)

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